There are many non-standard materials, and often these require the user to know about special processing requirements, to protect the tools and other user's samples from contamination.

---

Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	ALD-EML	Deposition	CVD	Atomic Layer Deposition	EML
+	EML	anneal-furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	Box-Furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	eBeam-AJA	Deposition	Evaporate	Metal and dielectric evaporator	EML
+	EML	filmetrics	Metrology	Thickness	Thin Film Optical Measurement	EML
+	EML	OxidationTube	Diffusion	Oxidation	Oxidation Furnace	EML
+	EML	plasmatherm	Deposition, Etch	PECVD, RIE	Plasma Etch and Deposition	EML
+	EML	RTA-EML	Diffusion	Bake	Rapid Thermal Annealing	EML
+	EML	SolventHood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	ALD-Oxford	Deposition	CVD, PECVD	Atomic Layer Deposition	Green
	MTL	Procedures-Cleaning	Procedures	Clean	Sample Cleaning	Red &Green
	MTL	Procedures-Deposition	Procedures	Deposit	Deposition of thin films	Red &Green
	MTL	Procedures-Etching	Procedures	Etch	Etching of materials	Red &Green
	MTL	Procedures-Metrology	Procedures	Metrology	Test and Measurement	Red &Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	AJA-TRL	Deposition	Sputter	Sputter deposition tool	Red
+	TRL	asher-TRL	Photo	Clean	Barrel asher for resist removal	Red &Green
+	TRL	CCNT	Deposition	PECVD	Carbon nanotube growth	Red
+	TRL	eBeamAu	Deposition	Evaporate	Metal evaporator	Red
+	TRL	ellipsometer-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	Filmetrics-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	nanospec	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	parylene	Deposition	CVD	Parylene depopsition	Red
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	PZTcoater	Deposition	Spin-Coat	Coater to apply PZT films	Red
+	TRL	PZTfurnace	Deposition	Bake	Bake oven for PZT coated wafers	Red