My Process:

Machines by Material Keyword: CMOS Metals

CMOS compatible metals, only: Al, Ti, Ni, Pt. (and TiN even if it's not really a metal). Nothing else
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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EML ALD-EML DepositionCVD Atomic Layer Deposition
EML
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EML anneal-furnace DiffusionBake Anneal Furnace
EML
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EML Box-Furnace DiffusionBake Anneal Furnace
EML
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EML eBeam-AJA DepositionEvaporate Metal and dielectric evaporator
EML
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EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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EML RTA-EML DiffusionBake Rapid Thermal Annealing
EML
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EML SputtererAJA DepositionSputter Sputter deposition tool
EML
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL pTrack PhotoCoat Automated coater and developer track
Green
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ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
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ICL eBeam-EVO DepositionEvaporate Metal evaporator of CMOS compatible metals
Green
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ICL endura DepositionSputter Metal sputter deposition
Green
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ICL GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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ICL goldwire PackagingPhysical Gold ball bonder for device packaging
Red
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
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ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
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ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
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ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
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ICL RTP DiffusionBake Rapid Thermal Annealing
Green
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ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL eBeamAu DepositionEvaporate Metal evaporator
Red
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TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL Hall-probe MetrologyElectrical Carrier measurement
Red
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TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL Resonetics PhotoExpose Laser ablation system
Red
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
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TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
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LEAP AutoBonder PackagingPhysical Automated wirebonder
Red
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LEAP BallBonder PackagingPhysical Manual ball bonder
Red
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LEAP WedgeBonder PackagingPhysical Manual wedge bonder
Red