Metals that are not CMOS compatible, such as gold, copper, and everything not listed in CMOS Metals.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	anneal-furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	BalzerSputterer	Deposition	Sputter	Thin sputter coating of samples	EML
+	EML	Box-Furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	eBeam-AJA	Deposition	Evaporate	Metal and dielectric evaporator	EML
+	EML	parametric-tester	Metrology	Electrical	Probe station for electrical measurements	EML
+	EML	plasmatherm	Deposition, Etch	PECVD, RIE	Plasma Etch and Deposition	EML
+	EML	RTA-EML	Diffusion	Bake	Rapid Thermal Annealing	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	TRL	2Dtransfer-platingHood	Wet	Acids	Electroplating wet bench and fume hood	Red
+	ICL	4-pt-probe	Metrology	Electrical	Sheet resistance measurement of semiconductors	Red
+	ICL	cv	Metrology	Electrical	Electrical characterization of dielectrics	Green
+	ICL	GnP	Wet	Other	Chemical Mechanical Polishing to planarize surfaces	Red &Green
+	ICL	goldwire	Packaging	Physical	Gold ball bonder for device packaging	Red
+	ICL	Oxford-100_PECVD	Deposition, Etch	PECVD	Dual chamber PECVD and plasma etch tool	Red
+	ICL	Oxford-100_Etch	Deposition, Etch	RIE	Dual chamber PECVD and plasma etch tool	Red
	MTL	Procedures-Deposition	Procedures	Deposit	Deposition of thin films	Red &Green
	MTL	Procedures-Etching	Procedures	Etch	Etching of materials	Red &Green
	MTL	Procedures-Metrology	Procedures	Metrology	Test and Measurement	Red &Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	AJA-TRL	Deposition	Sputter	Sputter deposition tool	Red
+	TRL	Balzer-Elionix	Deposition	Sputter	SEM or EBL sample preparation	Red
+	TRL	eBeamAu	Deposition	Evaporate	Metal evaporator	Red
+	TRL	eBeamFP	Deposition	Evaporate	Fast pumping metal evaporator	Red
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	Hall-probe	Metrology	Electrical	Carrier measurement	Red
+	TRL	IV-probe	Metrology	Electrical	Probe station with curve tracer for IV measurement	Red
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	SAMCO	Etch	RIE	Chlorine based plasma etcher for III-V materials	Red
+	LEAP	AutoBonder	Packaging	Physical	Automated wirebonder	Red
+	LEAP	BallBonder	Packaging	Physical	Manual ball bonder	Red
+	LEAP	WedgeBonder	Packaging	Physical	Manual wedge bonder	Red