TRL / dektak:Stylus Profilerometer
Description
Classifications
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| Lab and Coral Name | TRL / dektak |
| Model | Sloan Dektak II |
| Specialist | David Terry (Paul Tierney) |
| Physical Location | 4F Photo-South |
Classifications
| Process Category | Metrology |
| Subcategory | TBD |
| Material Keywords | None |
| Sample Size | 6" Wafers, 4" Wafers, 7" Photo Plates, 5" Photo Plates, Pieces |
| Alternative | none |
| Keywords | single wafer, manual load, top side of sample, manual operation, alignment |
The dektak is a stylus (contact) profilometer that is used to measure height differences (steps) on samples for Au based processes. This system operates by the stylus physically making contact with the sample surface and moving the stylus to measure changes in surface height.
| Best for | For measuring the step height for PR, metals and dielectrics. |
| Limitations | Depth monitoring in small openings (~ 100nm wide) is challenging. |
| Characteristics/FOM | Stylus moves over the surface to map the surface topography |
| Caution with | Sample surface should be hard enough to avoid any deposits over the tip (e.g if PR is not sufficiently bakes) |
| Machine Charges | 2/hr |
Process Matrix Details
Permitted
Been in the ALD, Pyrex Substrates, III-V Substrates, Germanium on surface, Germanium buried, Pieces, Gold or RED color code (Adds), Any exposure to CMOS metal, CMOS metal on surface, CMOS metal buried, Been in the STS DRIE, Been in the SEM, Been in the Concept1, Has Photoresist, Has Polyimide, Has Cured SU8, Coming from KOH, Coming from CMP
Not Allowed
Ever been in EML
For more details or help, please consult PTC matrix, email ptc@mtl.mit.edu, or ask the research specialist (David Terry)
Permitted
Been in the ALD, Pyrex Substrates, III-V Substrates, Germanium on surface, Germanium buried, Pieces, Gold or RED color code (Adds), Any exposure to CMOS metal, CMOS metal on surface, CMOS metal buried, Been in the STS DRIE, Been in the SEM, Been in the Concept1, Has Photoresist, Has Polyimide, Has Cured SU8, Coming from KOH, Coming from CMP
Not Allowed
Ever been in EML
For more details or help, please consult PTC matrix, email ptc@mtl.mit.edu, or ask the research specialist (David Terry)
Please enter any feedback or corrections to this page, and hit send.