No sample sizes… I guess not the most useful tool for processing.

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Process	Lab	Tool	Keywords	0	Description	Color Code
	MTL	Procedures-Cleaning	ERRORERROR	Sample Cleaning	Red &Green
	MTL	Procedures-Deposition	ERRORERROR	Deposition of thin films	Red &Green
	MTL	Procedures-Etching	ERRORERROR	Etching of materials	Red &Green
	MTL	Procedures-General	ERRORERROR	Broader concepts	Red &Green
	MTL	Procedures-Lithography	ERRORERROR	Lithography	Red &Green
	MTL	Procedures-Metrology	ERRORERROR	Test and Measurement	Red &Green
+	TRL	SU8oven	ERRORERROR	Oven to dry foil from SU8 coater	Purple
+	Other	OutsideLab	ERRORERROR	Tools used in outside facilities	Red
+	Other	CNS	ERRORERROR	Tools used in Harvard CNS	Red
+	Other	NSL	ERRORERROR	Tools used in NSL bldg 39	Red
+	Other	SNL	ERRORERROR	Tools used in SNL bldg 37	Red