Machines by Material Keyword: 2D Materials
Process | Lab | Tool | Process Category | Subcategory | Description | |
---|---|---|---|---|---|---|
EML | acid-hood-EML | Wet | Solvents | General Purpose Acid Fume-Hood | ||
EML | plasmatherm | Deposition, Etch | PECVD, RIE | Plasma Etch and Deposition | ||
EML | SolventHood-EML | Wet | Solvents | Solvent Fume hood for lithography | ||
MTL | Procedures-Cleaning | Procedures | Clean | Sample Cleaning | ||
MTL | Procedures-Deposition | Procedures | Deposit | Deposition of thin films | ||
MTL | Procedures-Etching | Procedures | Etch | Etching of materials | ||
MTL | Procedures-Metrology | Procedures | Metrology | Test and Measurement | ||
TRL | acid-hood | Wet | Acids | Acid processing station | ||
TRL | CCNT | Deposition | PECVD | Carbon nanotube growth | ||
TRL | Greenflo | Wet | Acids | Acid processing station | ||
TRL | plasmaquest | Etch | RIE | Fluorine and Chlorine general purpose plasma deposition and etch tool | ||
TRL | SAMCO | Etch | RIE | Chlorine based plasma etcher for III-V materials |