Material Properties

6.777J/2.751J Material Properties Database

Material

Aluminum (incl. alloys w/ Si or Si+Cu)

Aluminum Oxide (CVD)

Chromium (PVD)

Copper (PVD or electroplated)

Gold (PVD or electroplated)

Indium Tin Oxide

Nickel (PVD or electroplated)

Parylene C

PDMS (polydimethylsiloxane)

PMMA

Polyimide (select one particular type)

Pyrex Glass

Amorphous Silicon

Si-Ge alloy

APCVD Silicon Dioxide

LPCVD Silicon Dioxide

PECVD Silicon Dioxide

Thermal Silicon Dioxide

LPCVD Silicon Nitride (silicon-rich)

LPCVD Silicon Nitride (stoichiometric)

PECVD Silicon Nitride

SU-8 Photoresist

Titanium (PVD) [1]

Titanium (PVD) [2]

Tungsten (PVD or CVD)