Any corrosive chemicals (usually acids) for wet processing

---

Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	TRL	2Dtransfer-platingHood	Wet	Acids	Electroplating wet bench and fume hood	Red
+	ICL	nitrEtch-HotPhos	Wet	Acids	Hot phosphoric nitride etch bath	Green
+	ICL	oxEtch-BOE	Wet	Acids	Silicon dioxide etch bath	Green
+	ICL	premetal-Piranha	Wet	Acids	Piranha resist removal and cleaning station	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green
	MTL	Procedures-Etching	Procedures	Etch	Etching of materials	Red &Green
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	rca-TRL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green