Some tools can process pieces, but require a special mounting procedure or the use of a special puck (not just a dummy wafer to sit on).

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Process	Lab	Tool	Keywords	0	Description	Color Code
+	ICL	concept1	ERRORERROR	PECVD deposition of oxides, nitrides, and TEOS	Green
+	ICL	endura	ERRORERROR	Metal sputter deposition	Green
+	ICL	GnP	ERRORERROR	Chemical Mechanical Polishing to planarize surfaces	Red &Green
+	ICL	i-stepper	ERRORERROR	i-line stepper	Red &Green
+	ICL	LAM490B	ERRORERROR	Chlorine based plasma etching of silicon	Green
+	ICL	LAM590-ICL	ERRORERROR	Fluorine based plasma etching of silicon oxide and nitrides	Green
+	ICL	rainbow	ERRORERROR	Chlorine based plasma etcher for metals	Green
+	ICL	RTA2	ERRORERROR	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	ERRORERROR	Rapid Thermal Annealing	Red
+	ICL	RTP	ERRORERROR	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	ERRORERROR	Rapid Thermal Annealing	Green
+	ICL	UV1280	ERRORERROR	Thin film characterization	Green
+	ICL	VTR	ERRORERROR	Low stress silicon nitride deposition	Green
+	TRL	asherMatrix-TRL	ERRORERROR	Single wafer oxygen plasma for photoresist removal	Red
+	TRL	LAM590-TRL	ERRORERROR	Fluorine based plasma etching of oxide and nitrides	Red
+	TRL	sts1	ERRORERROR	Deep reactive ion etcher for silicon	Red
+	TRL	sts2	ERRORERROR	Deep reactive ion etcher for silicon	Green
+	TRL	sts-Pegasus	ERRORERROR	Deep reactive ion etcher for silicon	Red