SU8 is a thick polymer. It has a special status, because not fully cured residues can heavily contaminate plasma chambers.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	coater-EML	Photo	Coat	Photoresist Coater	EML
+	EML	filmetrics	Metrology	Thickness	Thin Film Optical Measurement	EML
+	EML	MA-4	Photo	Expose	Contact Lithography Mask Aligner	EML
+	EML	photo-hood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
	MTL	Procedures-Cleaning	Procedures	Clean	Sample Cleaning	Red &Green
	MTL	Procedures-Lithography	Procedures	Photo	Lithography	Red &Green
+	TRL	ellipsometer-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	EV1	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	Filmetrics-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	nanospec	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	OAI-Flood	Photo	Expose	Flood exposure for image reversal resists	Red &Green
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red
+	TRL	SU8spinner	Photo	Coat	Manual spin-coater for SU8 resists	Purple