Gallium nitride materials

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	plasmatherm	Deposition, Etch	PECVD, RIE	Plasma Etch and Deposition	EML
+	ICL	diesaw	Packaging	Physical	Wafer dicing saw	Red
+	ICL	diesaw-3240	Packaging	Physical	Wafer dicing saw	Red
+	ICL	GnP	Wet	Other	Chemical Mechanical Polishing to planarize surfaces	Red &Green
+	ICL	rainbow	Etch	RIE	Chlorine based plasma etcher for metals	Green
+	ICL	SM-300	Metrology	Thickness	Thickness measurement for CMP processing	Red &Green
	MTL	Procedures-Cleaning	Procedures	Clean	Sample Cleaning	Red &Green
	MTL	Procedures-Etching	Procedures	Etch	Etching of materials	Red &Green
	MTL	Procedures-Metrology	Procedures	Metrology	Test and Measurement	Red &Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	develop-Brewer	Photo	Coat	Resist develop and postbake	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	SAMCO	Etch	RIE	Chlorine based plasma etcher for III-V materials	Red