My Process:

Machines by Material Keyword: III-V

Any compound semiconductor
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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ICL diesaw PackagingPhysical Wafer dicing saw
Red
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ICL diesaw-3240 PackagingPhysical Wafer dicing saw
Red
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ICL SM-300 MetrologyThickness Thickness measurement for CMP processing
Red &Green
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
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TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red