Polyimide (regular or photo-definable)

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	asher-EML	Photo	Clean	Oxygen Plasma	EML
+	EML	coater-EML	Photo	Coat	Photoresist Coater	EML
+	EML	filmetrics	Metrology	Thickness	Thin Film Optical Measurement	EML
+	EML	MA-4	Photo	Expose	Contact Lithography Mask Aligner	EML
+	EML	photo-hood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	SolventHood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	ICL	i-stepper	Photo	Expose	i-line stepper	Red &Green
+	ICL	UV1280	Metrology	Thickness	Thin film characterization	Green
	MTL	Procedures-Cleaning	Procedures	Clean	Sample Cleaning	Red &Green
	MTL	Procedures-Lithography	Procedures	Photo	Lithography	Red &Green
+	TRL	coater	Photo	Coat	Manual spin-coater for photoresists	Red &Green
+	TRL	ellipsometer-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	EV1	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	EV-LC	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	Filmetrics-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	MA-6	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	nanospec	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	OAI-Flood	Photo	Expose	Flood exposure for image reversal resists	Red &Green
+	TRL	photo-wet-Au	Wet	Solvents	Solvent fume hood with sonicator	Red &Green
+	TRL	photo-wet-l	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	photo-wet-r	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	PMMAspinner	Photo	Coat	Manual coater for PMMA and other photoresists	Red &Green
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red
+	TRL	SolventHood-TRL	Wet	Solvents	Solvent fume hood	Red &Green
+	TRL	varTemp	Photo	Bake	Bake oven for variable temperature	Red